EPM excimer laser micro-marking system
  • Classification:Solution
  • Author: Shengfang Technology
  • Release time:2026-07-22

System Features

  • The EPM micro-marking system is a high-performance system based on a 193nm excimer laser
  • Mainly composed of a 193nm deep ultraviolet excimer laser light source, optical transmission system, and precision positioning system
  • Features include short laser wavelength, short pulse width, high peak power, and high energy density
  • Particularly suitable for high-precision micro-marking applications on surfaces of organic materials, glass, ceramics, and other materials
  • Desktop placement, with selectable 193nm/248nm wavelengths
  • Software customizable for fabricating microchannels, micropores, and other features

Technical Parameters

ModelEPM
Laser Wavelength193nm
Typical Pulse Width~10ns
Focused Spot SizeMinimum 30um
Energy Density>5J/cm2
Processing Area100mm*100mm
Position Accuracy5um


Specifications

 

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