PLD20, PLD30 excimer lasers

Maximum single pulse energy up to 650/500mJ

PLD20L excimer laser

Maximum single-pulse energy up to 800mJ

PLD50L excimer laser

Maximum single-pulse energy up to 800mJ

PLD100 excimer laser

Maximum single-pulse energy up to 200mJ, maximum repetition rate 100Hz.

PLD100L Excimer Laser

Pulse energy up to 400mJ, maximum repetition rate 100Hz.