Product Features
Product Features:
- Pulse energy up to 800mJ
- Magnetic assist excitation circuit design extends thyratron lifespan
- Built-in energy feedback system for excellent energy stability
- Internal trigger/external trigger
Applications:
- Laser deposition of thin films, precision machining, material surface treatment, laser annealing
Hardware specifications
| Technical Specifications | |||||
| Medium Gas | ArF | KrF | XeCl | XeF | |
| Wavelength (nm) | 193 | 248 | 308 | 351 | |
| Maximum Single Pulse Energy (mJ) | 400 | 800 | 500 | 400 | |
| Average Power (W) | 7 | 14 | 9 | 7 | |
| Maximum Repetition Rate (Hz) | 20 | ||||
| Pulse Width (FWHM, ns) | 25±5 | ||||
| Beam Size (mm)(V*H) | （26±1）×（9±1） | ||||
| Energy Stability (sigma, %) | |||||
| Divergence Angle (mrad)(V*H) | |||||
| Cooling Method | |||||
| Interaction Mode | |||||
| External Trigger: Electrical Signal | |||||
（Maximum repetition rate can be customized to 30Hz）
Specifications: PLD20L： 1650×405×900mm （300kg）
Optional information
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