Pulsed laser deposition system
  • Classification:Solution
  • Author: Shengfang Technology
  • Release time:2026-07-22

Pulsed laser deposition (PLD) is a method in which a laser is focused onto a small area of a target material, utilizing the high energy density of the laser to evaporate or even ionize part of the target material, allowing it to detach from the target and move toward the substrate, where it deposits to form a thin film. Among the many thin film preparation methods, pulsed laser deposition technology is widely applied and can be used to prepare thin films of various materials such as metals, semiconductors, oxides, nitrides, carbides, borides, silicides, sulfides, and fluorides, and even to prepare films of some materials that are difficult to synthesize, such as diamond and cubic nitride films.

Pulsed laser deposition system (PLD): Recommended light sources include our PLD20, PLD30, and PLD20L excimer lasers, and the vacuum chamber can be selected from Shenyang Keyi PLD450 or LMBE450 models, among others. This system solution offers exceptional cost-effectiveness, is fully domestically produced, and meets the requirements for the preparation and research of most material thin films.

Attachment: Research papers published by university professors (using pulsed laser deposition systems configured with Shengfang Technology PLD excimer laser series)

 

No.

Paper Title

Journal

Affiliation

Publication Year

1

Ferroelectric Hf0.5Zr0.5O2 thin films deposited epitaxially on (110)-oriented SrTiO3

Applied Physics Letters

Nanjing University

2021

2

Electroresistance in metal/ferroelectric/semiconductor tunnel junctions based on a Hf0.5Zr0.5O2 barrier

Applied Physics Letters

Nanjing University

2021

3

Pulsed laser deposited and sulfurized Cu2ZnSnS4 thin film for efficient solar cell

Solar Energy Materials and Solar Cells

Shenzhen University

2021

4

nanosecond laser-induced surface damage and its mechanism of caf2 optical window at 248 nm KrF excimer laser

Scientific Reports

National University of Defense Technology

2020

 

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