PLD20, PLD30 excimer lasers
Maximum single pulse energy up to 650/500mJ
Maximum single pulse energy up to 650/500mJ
Maximum single-pulse energy up to 800mJ
Maximum single-pulse energy up to 800mJ
Maximum single-pulse energy up to 200mJ, maximum repetition rate 100Hz.
Pulse energy up to 400mJ, maximum repetition rate 100Hz.
Repetition frequency adjustable from 1 to 200Hz.
Repetition frequency adjustable from 1 to 200Hz.
Repetition frequency adjustable from 1 to 200Hz.
Repetition frequency adjustable from 1 to 500Hz.
Repetition frequency 1 - 1000Hz adjustable
System Overview The excimer laser annealing system uses an excimer laser as the light source, and after beam homogenization and shaping, it obtains an extremely uniform high-energy-density line-shaped laser beam, enabling uniform scanning of large-area samples; The excimer laser annealing system outputs a short wavelength with high photon energy and small sample absorption depth, primarily used for annealing or modification research of thin film materials, such as low-temperature polycrystalline silicon thin film annealing and development of optoelectronic functional thin film materials.