Product Features
Product Features:
- Magnetic switch design, longer service life
High repetition rate, good energy stability
Compact design, small footprint
Internal trigger/external trigger
Applications:
- Photomask inspection, fiber Bragg grating writing, optical component damage testing, ultraviolet photodissociation
Hardware specifications
| Technical Parameters | |||
| Medium Gas | ArF | KrF | |
| Wavelength (nm) | 193 | 248 | |
| Maximum Single Pulse Energy (mJ) | 8 | 16 | |
| Average Power (W) | 6 | 12 | |
| Maximum Repetition Rate (Hz) | 1000 | ||
| Pulse Width (FWHM, ns) | 10±3 | ||
| Energy Stability (sigma %) | 3 | ||
| Beam Size (mm)(V*H)5.7 | （5.7±0.5）×（3.0±0.5） | ||
| Divergence Angle (mrad)(V*H) | （2.25±0.5）×（1±0.5） | ||
| Product Dimensions (mm)(L*W*H) | 804.5×373×667 | ||
| Weight (kg) | 95 | ||
| Power Requirements | 220V, 50Hz, 5A | ||
| Cooling Method | Water Cooling | ||
| Interface Method | Control System: RS232 (LCD Screen/PC) | ||
| External Trigger: Electrical Signal | |||
(Customizable 308nm/351nm)
Specifications
Optional information
- Premixed gas 193/248nm 47L cylinder/6000L gas 16L cylinder/2000L gas
- High-purity neon gas 5.5N 40L cylinder/4000L gas 16L cylinder/2000L gas
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