Product Features
Product Features:
- Magnetic switch design for longer service life
High repetition rate with good energy stability
Compact design, small footprint
Internal trigger/external trigger
Applications:
- Photomask inspection, optical damage testing, fiber Bragg grating writing, UV photodissociation
Hardware specifications
| Technical Parameters | |||
| Medium Gas | ArF | KrF | |
| Wavelength (nm) | 193 | 248 | |
| Maximum Single Pulse Energy (mJ) | 10 | 16 | |
| Average Power (W) | 1.5 | 2.5 | |
| Maximum Repetition Rate (Hz) | 200 | ||
| Pulse Width (FWHM, ns) | 10±3 | ||
| Energy Stability (sigma %) | 2 | ||
| Beam Size (mm) (V*H) 5.7 | (5.7±0.5) × (3.0±0.5) | ||
| Divergence Angle (mrad) (V*H) | (2.25±0.5) × (1±0.5) | ||
| Product Dimensions (mm) (L*W*H) | 804.5×373×667 | ||
| Weight (kg) | 95 | ||
| Power Requirements | 220V, 50Hz, 5A | ||
| Cooling Method | Water-cooled | ||
| Interface Method | Control System: RS232 (LCD screen/PC) | ||
| External Trigger: Electrical signal | |||
Specifications
Optional information
- Premixed gas 193/248nm 47L cylinder/6000L gas 16L cylinder/2000L gas
- High-purity neon gas 5.5N 40L cylinder/4000L gas 16L cylinder/2000L gas
