Excimer laser lift-off system
  • Classification:Solution
  • Author: Shengfang Technology
  • Release time:2026-07-22

System Overview

Laser ablation is an important means of micro-area analysis and a key development direction for in-situ micro-area trace element and isotope analysis. The LA-193 excimer laser ablation system offers exceptional cost-effectiveness, with the laser fully domestically produced, and software/hardware support for direct coupling with inductively coupled plasma mass spectrometers and spectrometers. The 193nm excimer laser belongs to the deep ultraviolet "cold laser" category, and its high-energy-density uniform flat-top beam can ablate various samples, even transparent materials such as high-purity quartz and fluorite.

System Features

  • Energy density up to 30J/cm2, capable of ablating quartz, fluorite, etc.
  • Uniform laser beam energy distribution for even ablation
  • Standard 100x100mm moving stage, optional 150x150mm stage
  • Independent video and laser optical control units for better viewing of sample ablation points
  • Ablation spot size range 10-200μm, with 12 standard ablation spots, customizable spots available
  • Includes sample cell and carrier gas system

 Technical Specifications

ModelLA-193
Laser Wavelength193nm
Laser Pulse Width<25ns
Maximum Repetition Rate20Hz
Ablation Spot Size10-170μm
Maximum Laser Energy Density30J/cm2
Microscopic Imaging Resolution2.5μm
Step Repeat Accuracy+/- 3 um
Weight600kg
Dimensions (L×W×H)2600mm×650mm×1800mm

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