Product Features
System Features
- Line-scanning beam enables uniform processing of large-area samples
- Multi-level lens array homogenization technology ensures excellent beam uniformity
- Laser wavelengths selectable at 308nm, 248nm, with 351nm and 193nm available upon customization
- Line beam dimensions customizable
Hardware specifications
Model | ELA-308-100 | ELA-248-100 | ELA-248-50 |
Laser Wavelength | 308nm | 248nm | 248nm |
Laser Beam Size | 100mm×0.3mm | 100mm×0.4mm | 50mm×0.8mm |
Maximum Laser Energy Density | 450 mJ/cm2 | 200 mJ/cm2 | 200 mJ/cm2 |
Beam Uniformity | >92% | >92% | >92% |
Scan Step Accuracy | 5μm | 5μm | 5μm |
Processing Atmosphere | N2/Air | N2/Air | N2/Air |
Weight | 500Kg | 500Kg | 500Kg |
Cooling Method | Air | Air | Air |
Dimensions (L×W×H) | 1600mm×1600mm×1400mm | 1800mm×900mm×1600mm | 1800mm×900mm×1600mm |
