Product Features
System Features
- Suitable for peeling thin films such as polyimide from substrates like glass and sapphire
- Line-scanning beam enables uniform peeling of large-area samples
- Utilizes multi-level lens array beam homogenization technology for excellent beam uniformity
- Laser wavelengths selectable at 308nm and 248nm
Hardware specifications
Technical Parameters
Model | LLO-308-100 | LLO-248-100 |
Laser Wavelength | 308nm | 248nm |
Laser Beam Size | 100mm×0.3mm | 100mm×0.4mm |
Maximum Laser Energy Density | 300 mJ/cm2 | 200 mJ/cm2 |
Beam Uniformity | >92% | >92% |
Scanning Step Accuracy | 5μm | 5μm |
Weight | 500Kg | 500Kg |
Cooling Method | Water | Water |
Dimensions (L×W×H) | 1600mm×1600mm×1400mm | 1800mm×900mm×1600mm |
