Product Features
Product Features:
- Maximum single pulse energy of 650mJ
- Magnetic assistor excitation circuit design to extend thyratron lifespan
- Built-in energy feedback system for excellent energy stability
- Internal trigger/external trigger
Applications:
- Laser deposition of thin films, precision machining, material surface treatment, laser annealing
Hardware specifications
| Technical Parameters | |||||
| Medium Gas | ArF | KrF | XeCl | XeF | |
| Wavelength (nm) | 193 | 248 | 308 | 351 | |
| Maximum Single Pulse Energy (mJ) | PLD30 | 200 | 500 | 300 | 200 |
| PLD20 | 300 | 650 | 400 | 300 | |
| Average Power (W) | PLD30 | 5 | 14 | 8 | 5 |
| PLD20 | 5 | 12 | 8 | 5 | |
| Maximum Repetition Rate (Hz) | PLD30 | 30 | |||
| PLD20 | 20 | ||||
| Pulse Width (FWHM, ns) | PLD30 | 25±5 | |||
| PLD20 | |||||
| Beam Size (mm) (V*H) | PLD30 | （26±1）×（9±1） | |||
| PLD20 | |||||
| Energy Stability (sigma, %) | 1 (measured at 248nm output) | ||||
| Divergence Angle (mrad) (V*H) | ~3×1 | ||||
| Cooling Method | Water-cooled | ||||
| Interface Method | Control system: RS232 (LCD screen/PC) | ||||
| External trigger: Electrical signal | |||||
Specifications: PLD30/PLD20: 1500×450×880mm (300kg)
