Product Features
Product Features:
- Pulse energy up to 400mJ
- Maximum repetition rate of 100Hz
- Built-in energy feedback system for excellent energy stability
- Internal trigger/external trigger
Applications:
- Laser deposition of thin films, precision machining, material surface treatment, laser annealing
Hardware specifications
| Medium gas | ArF | KrF | XeCl | ||
| Wavelength (nm) | 193 | 248 | 308 | ||
| Maximum pulse energy (mJ) | PLD100L | 240 | 400 | 250 | |
| Maximum average power (W) | PLD100L | 12 | 30 | 16 | |
| Maximum repetition rate (Hz) | PLD100L | 100 | |||
| Pulse width (FWHM, ns) | PLD100L | 25±5 | |||
| Beam size (mm) (V*H) | PLD100L | (26±1)×(9±1) | |||
| Energy stability (sigma, %) | 1 (energy at 248nm output) | ||||
| Divergence angle (mrad)(V*H) | ~3×1 | ||||
| Cooling method | Water-cooled | ||||
| Interface method | Control system: RS232 (LCD screen/PC) | ||||
| External trigger: electrical signal | |||||
Specifications: PLD100L: 1300×400×875mm (300kg)
Optional information
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