Product Features
Product Features:
- High repetition rate, good energy stability
- Compact design, small size
- Internal trigger/external trigger
Applications:
- Laser deposition of thin films, precision machining, material surface treatment, laser annealing
Hardware specifications
| Technical Parameters | |||
| Medium Gas | ArF | KrF | XeCl |
| Wavelength (nm) | 193 | 248 | 308 |
| Maximum Single Pulse Energy (mJ) | 100 | 200 | 100 |
| Average Power (W) | 8 | 18 | 8 |
| Maximum Repetition Rate (Hz) | 100 | ||
| Pulse Width (FWHM, ns) | ~15 | ||
| Energy Stability (sigma %) | 2 | ||
| Beam Size (mm) (V*H) | 14×5 | ||
| Divergence Angle (mrad) (V*H) | ~3×1 | ||
| Product Dimensions (mm) (L*W*H) | 1015×537×582 | ||
| Weight (kg) | 100 | ||
| Power Supply Requirements | 220V, 50Hz, 10A | ||
| Cooling Method | Water Cooling | ||
| Interaction Method | Control System: RS232 (LCD Screen/PC) | ||
| External Trigger: Electrical Signal | |||
Specifications: 1015mm×537mm×582mm
