Product Features
Pulse energy up to 800mJ
Magnetic assist excitation circuit design extends thyratron lifespan
Built-in energy feedback system for excellent energy stability
Internal trigger/external trigger
Supports dual-wavelength customization
Hardware specifications
| Technical Parameters | ||||
| Medium Gas | ArF | KrF | XeCl | |
| Wavelength (nm) | 193 | 248 | 308 | |
| Maximum Single Pulse Energy (mJ) | PLD50L | 400 | 800 | 500 |
| Average Power (W) | PLD50L | 15 | 33 | 20 |
| Maximum Repetition Rate (Hz) | PLD50L | 50 | ||
| Pulse Width (FWHM, ns) | PLD50L | 25±5 | ||
| Beam Size (mm) (V*H) | PLD50L | (26±1) × (9±1) | ||
| Energy Stability (sigma, %) | 1 (measured at 248nm output) | |||
| Divergence Angle (mrad) (V*H) | ~3×1 | |||
| Cooling Method | Water cooling | |||
| Interface Method | Control system: RS232 (LCD screen/PC) | |||
| External trigger: Electrical signal | ||||
