Product Features
Our company can provide premixed gases for 248nm and 193nm excimer lasers.
Hardware specifications
Specifications: 16L cylinder/2000L gas, 47L cylinder/6000L gas
| Wavelength | Cylinder Volume | Gas Capacity | Valve Specification |
| 248nm | 16L | 2000L | CGA679/DIN8 |
| 248nm | 47L | 6000L | CGA679/DIN8 |
| 193nm | 16L | 2000L | CGA679/DIN8 |
| 193nm | 47L | 6000L | CGA679/DIN8 |
