Excimer laser accessories

Fluorine gas filter

Specification/Model: 70-54CFEF

Fluorine gas filter

Product Features

Dimensions: φ10cm, height 22.5cm

Connection: 1/4 compression straight-through

Filtration performance: For a laser mixed gas containing 0.1% fluorine, after passing through one fluorine filter, the fluorine content is reduced to below 1 ppm (parts per million); when two filters are used in series, the fluorine content can be reduced to below 0.01 ppm.

Hardware specifications

Optional information

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