Shenzhen Shengfang launches domestically produced 1000Hz excimer laser - high repetition rate excimer laser.
  • Classification:Company News
  • Author: Shengfang Technology
  • Release time:2026-08-17

Shenzhen Shengshengfang Technology's new product---FBG1kHz is here!

This excimer laser has an adjustable repetition rate of 1-1000Hz, and can be applied to fiber Bragg grating writing, optical testing, photomask inspection, and more.

The wavelength can be selected at 193/248nm, with maximum repetition rates of 200/500/1000Hz available. This product features a compact design with a small footprint; a magnetic switch design for longer service life; high repetition rate with good energy stability; and supports both internal and external triggering modes.

Specific parameters are as follows:

Medium gas

ArF

KrF

Wavelength (nm)

193

248

Maximum pulse energy (mJ)

12

16

Average power (W)

2/5/8

2.5/6/12

Maximum repetition rate (Hz)

200/500/1000

Pulse width (FWHM, ns)

5±2, 10 (1000Hz)

Energy stability (sigma %)

2

Beam size (mm) (V*H)

(5.7±0.5) × (2.5±0.5)

Divergence angle (mrad) (V*H)

(2.25±0.5) × (1±0.5)

Product dimensions (mm) (L*W*H)

804.5 × 373 × 667

Weight (kg)

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